A piezoresistive pressure sensor is a type of pressure sensor that operates based on the principle of piezoresistivity. Piezoresistivity refers to the change in electrical resistance of certain materials when subjected to mechanical strain or pressure. These sensors are widely used in various applications, including automotive, industrial, medical, and consumer electronics.
The working principle of a piezoresistive pressure sensor can be broken down into the following steps:
Construction: The sensor is typically constructed using a diaphragm made of a piezoresistive material, such as silicon. The diaphragm is a thin, flexible membrane that deforms under applied pressure.
Wheatstone Bridge Configuration: The piezoresistive material is patterned into a Wheatstone bridge configuration. A Wheatstone bridge consists of four resistors connected in a diamond shape, with the diaphragm acting as one of the resistors. The other three resistors are usually made of the same piezoresistive material but are not subjected to any pressure.
Initial Equilibrium: In the absence of any applied pressure, the Wheatstone bridge is in a balanced state, and the output voltage across the bridge is zero. This is the initial equilibrium condition.
Pressure Application: When pressure is applied to the diaphragm, it undergoes mechanical deformation. As a result, the resistive element (diaphragm) experiences strain, causing a change in its electrical resistance.
Resistance Change: The mechanical strain on the piezoresistive material causes a corresponding change in its resistance. Most piezoresistive materials exhibit a positive gauge factor, meaning their resistance increases with compressive strain and decreases with tensile strain.
Imbalance of the Wheatstone Bridge: The change in resistance of the diaphragm disrupts the balanced state of the Wheatstone bridge. This imbalance leads to an output voltage across the bridge, which is proportional to the applied pressure.
Signal Processing: The output voltage from the Wheatstone bridge is a small analog signal that needs further processing. Typically, signal conditioning circuitry amplifies and converts the analog voltage into a digital signal for ease of processing and compatibility with digital systems.
Pressure Measurement: The processed digital signal represents the pressure applied to the diaphragm. By calibrating the sensor, the output voltage can be accurately correlated to the actual pressure value.
In summary, a piezoresistive pressure sensor converts applied pressure into an electrical signal by utilizing the piezoresistive effect in its sensing element. This electrical signal can then be measured, processed, and used for various applications, such as pressure monitoring and control systems.